Symposium D-5
Control of Interfaces and Materials Processing for Nanoelectronics
Organizers
Representative
- Seiichi MIYAZAKI
- Nagoya University
Co-Organizers
- Jun XU
- Nanjing University
- Sung Woo HWANG
(under negotiation) - Korea University
- Hitoshi TABATA
- The University of Tokyo
- Akira SAKAI
- Osaka University
- Kenji SHIRAISHI
- Nagoya University
Correspondence
- Kenji SHIRAISHI
- Nagoya University(shiraishi@cse.nagoya-u.ac.jp)
- Seiichi MIYAZAKI
- Nagoya University(miyazaki@nuee.nagoya-u.ac.jp)
Scope
This symposium will focus on surface/interface issues in advanced electron devices including scaled or advanced CMOS devices and will also highlight the progress in the material processing. The sessions will provide a forum for scientists and engineers to exchange information and ideas at the forefront of research on materials and processing toward ultimate integration and device performance. Topics of current interest will be reviewed with several invited talks. Contributions of both experimental and theoretical studied are welcome, especially those that provide a deeper understanding of surface and interface properties and an insight on precise control of material processing for future electron devices.
The sessions will consist of invited and contributed talks, and poster presentations.
Papers are solicited in, but not limited to, the following area:
1 .Characterization of Surfaces and Interfaces
2. Thin Film Growth and Surface Modification
3. Control of Phase Transition
4. Formation and Characterization of Nanostructures
5. Theoretical approaches for materials processing
6. Process and Device Technologies
Topics
- Characterization of Surfaces and Interfaces
- Thin Film Growth and Surface Modification
- Control of Phase Transision
- Formation and Characterization of Nanostructures
- Theoretical Approaches for Materials Processing
- Process and Device Technologies
Keynote Speakers
- D.D. SARMA
- Indian Institute of Science
- Kunji CHEN
- Nanjing University
Invited Speakers
- Cheol Seong HWANG
- Seoul National University
- Yoshihito TANAKA
- Riken SPring-8 Center
- Takashi NAKAYAMA
- Chiba University
- Hyunsang HWANG
- Pohang University of Science & Technology
- Kee Joo CHANDNG
- Korea Advanced Institute of Science and Technology
- Ariando
- National University of Singapore
- Deren YANG
- Zhejiang University