Symposia & Forums

Symposium D-5
Control of Interfaces and Materials Processing for Nanoelectronics

Organizers

Representative

Seiichi MIYAZAKI
Nagoya University

Co-Organizers

Jun XU 
Nanjing University
Sung Woo HWANG
(under negotiation)
Korea University
 
Hitoshi TABATA
The University of Tokyo
Akira SAKAI
Osaka University
Kenji SHIRAISHI
Nagoya University

Correspondence

Kenji SHIRAISHI
Nagoya University(shiraishi@cse.nagoya-u.ac.jp
Seiichi MIYAZAKI
Nagoya University(miyazaki@nuee.nagoya-u.ac.jp

Scope

This symposium will focus on surface/interface issues in advanced electron devices including scaled or advanced CMOS devices and will also highlight the progress in the material processing. The sessions will provide a forum for scientists and engineers to exchange information and ideas at the forefront of research on materials and processing toward ultimate integration and device performance. Topics of current interest will be reviewed with several invited talks. Contributions of both experimental and theoretical studied are welcome, especially those that provide a deeper understanding of surface and interface properties and an insight on precise control of material processing for future electron devices.
The sessions will consist of invited and contributed talks, and poster presentations.
Papers are solicited in, but not limited to, the following area:
1 .Characterization of Surfaces and Interfaces
2. Thin Film Growth and Surface Modification
3. Control of Phase Transition
4. Formation and Characterization of Nanostructures
5. Theoretical approaches for materials processing
6. Process and Device Technologies

Topics

  1. Characterization of Surfaces and Interfaces
  2. Thin Film Growth and Surface Modification
  3. Control of Phase Transision
  4. Formation and Characterization of Nanostructures
  5. Theoretical Approaches for Materials Processing
  6. Process and Device Technologies

Keynote Speakers

D.D. SARMA
Indian Institute of Science
Kunji CHEN
Nanjing University

Invited Speakers

Cheol Seong HWANG
Seoul National University
Yoshihito TANAKA
Riken SPring-8 Center
Takashi NAKAYAMA
Chiba University
Hyunsang HWANG
Pohang University of Science & Technology
Kee Joo CHANDNG
Korea Advanced Institute of Science and Technology
Ariando
National University of Singapore
Deren YANG
Zhejiang University