Symposium D-4
Fabrication of Thin Films
Partly supported by the Japan Society of Applied Physics (JSAP) Kyushu Chapter
Organizers
Representative
- Akira IZUMI
- Kyushu Institute of Technology
Co-Organizers
- Keisuke OHDAIRA
- Japan Advanced Institute of Science and Technology (JAIST)
- Yong SUN
- Kyushu Institute of Technology
- Masamichi NAITOH
- Kyushu Institute of Technology
- Motoi NAKAO
- Kyushu Institute of Technology
- Kensuke NISHIOKA
- Miyazaki University
- Akira HEYA
- University of Hyogo
- Jinn P. Chu
- National Taiwan University of Science and Technology
Correspondence
- Akira IZUMI
- Kyushu Institute of Technology（izumi@ele.kyutech.ac.jp）
Scope
The thin film technology is employed in a wide range of applications. Among the various deposition methods, chemical vapor deposition (CVD) and physical vapor deposition (PVD) processes are widely used in industry. However new processes and/or new materials have to be developed to improve the film properties and to enable synthesis of new materials.
This symposium will be focused on, but not restricted to, the current scientific advances in the field of thin-film synthesis based on CVD and PVD processes. The symposium will be an excellent exchange forum for the academic and industrial partners from the thin-film community, and will cover the following hot topics: 1) New deposition processes, including the HWCVD(Cat-CVD), PECVD, MOCVD, APCVD, magnetron sputtering, RTA , sol-gel, etc.; 2) Deposition process modeling and the in situ monitoring during thin-film growth; 3) Deposition of nanostructured films used for mechanical applications: hard coatings, oxidation resistance at high temperature, etc.; 4) Synthesis of thin films for electrical, optical and electro-optic applications,; and 5) Methods of thin-film characterization.
Topics
- Novel Methods of Thin-film Fabrication
- Modeling of Thin-film Fabrication Processes
- Electrical, Optical and Electro-optic Specialized Coatings
- High-temperature Oxidation and Wear-resistant Films
- Nanostructured Films for Optical and/or Electronic Applications
- Novel Methods for Characterization of Thin Films
Invited Speakers
- Hitoshi HABUKA
- Yokohama National University
- Makoto KASU
- Saga University